Lower-temperature fabrication of airbridges by grayscale lithography to increase yield of nanowire transmons in circuit QED quantum processors

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Standard

Lower-temperature fabrication of airbridges by grayscale lithography to increase yield of nanowire transmons in circuit QED quantum processors. / Stavenga, T.; Khan, S. A.; Liu, Y.; Krogstrup, P.; DiCarlo, L.

I: Applied Physics Letters, Bind 123, Nr. 2, 024004, 10.07.2023.

Publikation: Bidrag til tidsskrift › Tidsskriftartikel › Forskning › fagfællebedømt

Harvard

Stavenga, T, Khan, SA, Liu, Y, Krogstrup, P & DiCarlo, L 2023, 'Lower-temperature fabrication of airbridges by grayscale lithography to increase yield of nanowire transmons in circuit QED quantum processors', Applied Physics Letters, bind 123, nr. 2, 024004. https://doi.org/10.1063/5.0146814

APA

Stavenga, T., Khan, S. A., Liu, Y., Krogstrup, P., & DiCarlo, L. (2023). Lower-temperature fabrication of airbridges by grayscale lithography to increase yield of nanowire transmons in circuit QED quantum processors. Applied Physics Letters, 123(2), [024004]. https://doi.org/10.1063/5.0146814

Vancouver

Stavenga T, Khan SA, Liu Y, Krogstrup P, DiCarlo L. Lower-temperature fabrication of airbridges by grayscale lithography to increase yield of nanowire transmons in circuit QED quantum processors. Applied Physics Letters. 2023 jul. 10;123(2). 024004. https://doi.org/10.1063/5.0146814

Author

Stavenga, T. ; Khan, S. A. ; Liu, Y. ; Krogstrup, P. ; DiCarlo, L. / Lower-temperature fabrication of airbridges by grayscale lithography to increase yield of nanowire transmons in circuit QED quantum processors. I: Applied Physics Letters. 2023 ; Bind 123, Nr. 2.

Bibtex

@article{ff5b881c9e32404c9872823fd8475f47,
title = "Lower-temperature fabrication of airbridges by grayscale lithography to increase yield of nanowire transmons in circuit QED quantum processors",
abstract = "Quantum hardware based on circuit quantum electrodynamics makes extensive use of airbridges to suppress unwanted modes of wave propagation in coplanar-waveguide transmission lines. Airbridges also provide an interconnect enabling transmission lines to cross. Traditional airbridge fabrication produces a curved profile by reflowing resist at elevated temperature prior to metallization. The elevated temperature can affect the coupling energy and even yield of pre-fabricated Josephson elements of superconducting qubits, tunable couplers, and resonators. We employ grayscale lithography to enable reflow and thereby reduce the peak temperature of our airbridge fabrication process from 200 to 150 °C and link this change to a substantial increase in the physical yield of transmon qubits with Josephson elements realized using Al-contacted InAs nanowires.",
author = "T. Stavenga and Khan, {S. A.} and Y. Liu and P. Krogstrup and L. DiCarlo",
note = "Publisher Copyright: {\textcopyright} 2023 Author(s).",
year = "2023",
month = jul,
day = "10",
doi = "10.1063/5.0146814",
language = "English",
volume = "123",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics",
number = "2",

}

RIS

TY - JOUR

T1 - Lower-temperature fabrication of airbridges by grayscale lithography to increase yield of nanowire transmons in circuit QED quantum processors

AU - Stavenga, T.

AU - Khan, S. A.

AU - Liu, Y.

AU - Krogstrup, P.

AU - DiCarlo, L.

N1 - Publisher Copyright: © 2023 Author(s).

PY - 2023/7/10

Y1 - 2023/7/10

N2 - Quantum hardware based on circuit quantum electrodynamics makes extensive use of airbridges to suppress unwanted modes of wave propagation in coplanar-waveguide transmission lines. Airbridges also provide an interconnect enabling transmission lines to cross. Traditional airbridge fabrication produces a curved profile by reflowing resist at elevated temperature prior to metallization. The elevated temperature can affect the coupling energy and even yield of pre-fabricated Josephson elements of superconducting qubits, tunable couplers, and resonators. We employ grayscale lithography to enable reflow and thereby reduce the peak temperature of our airbridge fabrication process from 200 to 150 °C and link this change to a substantial increase in the physical yield of transmon qubits with Josephson elements realized using Al-contacted InAs nanowires.

AB - Quantum hardware based on circuit quantum electrodynamics makes extensive use of airbridges to suppress unwanted modes of wave propagation in coplanar-waveguide transmission lines. Airbridges also provide an interconnect enabling transmission lines to cross. Traditional airbridge fabrication produces a curved profile by reflowing resist at elevated temperature prior to metallization. The elevated temperature can affect the coupling energy and even yield of pre-fabricated Josephson elements of superconducting qubits, tunable couplers, and resonators. We employ grayscale lithography to enable reflow and thereby reduce the peak temperature of our airbridge fabrication process from 200 to 150 °C and link this change to a substantial increase in the physical yield of transmon qubits with Josephson elements realized using Al-contacted InAs nanowires.

U2 - 10.1063/5.0146814

DO - 10.1063/5.0146814

M3 - Journal article

AN - SCOPUS:85165346226

VL - 123

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 2

M1 - 024004

ER -

ID: 361078436