Soft-mask fabrication of gallium arsenide nanomembranes for integrated quantum photonics
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Soft-mask fabrication of gallium arsenide nanomembranes for integrated quantum photonics. / Midolo, L.; Pregnolato, T.; Kirsanske, G.; Stobbe, S.
In: Nanotechnology, Vol. 26, No. 48, 484002, 04.12.2015.Research output: Contribution to journal › Journal article › Research › peer-review
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TY - JOUR
T1 - Soft-mask fabrication of gallium arsenide nanomembranes for integrated quantum photonics
AU - Midolo, L.
AU - Pregnolato, T.
AU - Kirsanske, G.
AU - Stobbe, S.
PY - 2015/12/4
Y1 - 2015/12/4
KW - nanofabrication
KW - plasma etching
KW - photonic crystals
KW - III-V semiconconductors
KW - quantum photonics
KW - integrated optical circuits
U2 - 10.1088/0957-4484/26/48/484002
DO - 10.1088/0957-4484/26/48/484002
M3 - Journal article
C2 - 26552880
VL - 26
JO - Nanotechnology
JF - Nanotechnology
SN - 0957-4484
IS - 48
M1 - 484002
ER -
ID: 153371559