Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology
Research output: Contribution to journal › Journal article › Research › peer-review
Documents
- s41467-017-02392-5
Final published version, 1.01 MB, PDF document
Original language | English |
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Article number | 2216 |
Journal | Nature Communications |
Volume | 8 |
ISSN | 2041-1723 |
DOIs | |
Publication status | Published - 20 Dec 2017 |
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ID: 188118507