Atomic excitations in sputtering processes
Research output: Contribution to journal › Journal article › Research › peer-review
Original language | English |
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Journal | Radiation Effects |
Volume | 60 |
Issue number | 1-4 |
Pages (from-to) | 119-127 |
ISSN | 1042-0150 |
DOIs | |
Publication status | Published - 12 Jun 1982 |
ID: 230100414