In nature, micro- and nanostructures can add certain desirable functionalities to a surface. Examples of these include iridescence from the colorful wings of the butterfly or the water repellent structures on the lotus leaf, which is renowned for its self-cleaning ability. By adding designed surface topologies to existing products, one can obtain these functionalities without e.g. chemical modification, and thus lowering the environmental impact of the production. However, in order for these structures to meet the strict requirements of the consumer market, new metrology solutions are needed. In this thesis, scatterometry is investigated as a solution, for the metrology needs of two emerging markets, namely nanostructured plastic and nanowires.