Size-Controlled Spalling of LaAlO3/SrTiO3 Micromembranes

Publikation: Bidrag til tidsskriftTidsskriftartikelForskningfagfællebedømt

Dokumenter

  • Rasmus T. Dahm
  • Ricci Erlandsen
  • Felix Trier
  • Alessia Sambri
  • Emiliano Di Gennaro
  • Anita Guarino
  • Lukas Stampfer
  • Dennis Christensen
  • Fabio Miletto Granozio
  • Thomas S. Jespersen

The ability to form freestanding oxide membranes of nanoscale thickness is of great interest for enabling material functionality and for integrating oxides in flexible electronic and photonic technologies. Recently, a route has been demonstrated for forming conducting heterostructure membranes of LaAlO3 and SrTiO3, the canonical system for oxide electronics. In this route, the epitaxial growth of LaAlO3 on SrTiO3 resulted in a strained state that relaxed by producing freestanding membranes with random sizes and locations. Here, we extend the method to enable self-formed LaAlO3/SrTiO3 micromembranes with control over membrane position, their lateral sizes from 2 to 20 mu m, and with controlled transfer to other substrates of choice. This method opens up the possibility to study and use the two-dimensional electron gas in LaAlO3/SrTiO3 membranes for advanced device concepts.

OriginalsprogEngelsk
TidsskriftA C S Applied Materials and Interfaces
Vol/bind13
Udgave nummer10
Sider (fra-til)12341-12346
Antal sider6
ISSN1944-8244
DOI
StatusUdgivet - 17 mar. 2021

ID: 260296309